Facilities

Cambridge Microfab Ltd
Broadway Bourn
Cambridge CB23 2TA
England

T: +44 (0) 1954 718100
F: +44 (0) 1954 718164
E: info@microfab.co.uk

	Class 1000 Vacuum Laboratory single and multilayer sputtered thin films precise temperature and thickness control during deposition normal and reactive sputtering for elements, oxides and nitrides tunnel barrier formation for STJ fabrication plasma processing, etching and PACVD
	Class 100 Photolith Cleanrooms chemical cleaning suite, precision hotplates, resist spinners Karl Suss optical aligners with 2µ features & alignment capability research microscopes for inspection Talystep & Nanospec for thickness metrology probe stations for device verification
	Wafer Dicing silicon, sapphire, ceramics, metals kerf widths down to 75µm dicing up to 2.0mm thickness for some substrates resin bonded diamond blades
	Workshop 3 axis CNC milling manual milling manual lathes blast processing band-sawing
	Precision Components critical dimensions with tolerancing down to +/- 5µm parts from sub mm upwards metals from aluminium to hastelloy machinable ceramics, Macor, Shapal etc most plastics specialised mouldings (electronic packaging)

Cambridge Microfab Limited