Thermal Neutron Sensor

Thermal Neutron Probe

Downloads

Thin Film Deposition

Electro-Processing

Facilities


Cambridge Microfab Ltd
Broadway Bourn
Cambridge CB23 2TA
England

T: +44 (0) 1954 718100
F: +44 (0) 1954 718164

Facilities



Class 1000 Vacuum Laboratory

Class 1000 Vacuum Laboratory

single and multilayer sputtered thin films
precise temperature and thickness control during deposition
normal and reactive sputtering for elements, oxides and nitrides
tunnel barrier formation for STJ fabrication
plasma processing, etching and PACVD



Class 100 Photolith Cleanrooms

Class 100 Photolith Cleanrooms

chemical cleaning suite, precision hotplates, resist spinners
Karl Suss optical aligners with 2µ features & alignment capability
research microscopes for inspection
Talystep & Nanospec for thickness metrology
probe stations for device verification

Wafer Dicing

Wafer Dicing

silicon, sapphire, ceramics, metals
kerf widths down to 75µm
dicing up to 2.0mm thickness for some substrates
resin bonded diamond blades


Workshop

Workshop

3 axis CNC milling
manual milling
manual lathes
blast processing
band-sawing






Components

Precision Components

critical dimensions with tolerancing down to +/- 5µm
parts from sub mm upwards
metals from aluminium to hastelloy
machinable ceramics, Macor, Shapal etc
most plastics
specialised mouldings (electronic packaging)



Components